"We are currently considering legal options including an appeal to the Supreme Court," his son, John Demjanjuk Jr., said in an e-mail to The Associated Press.
"Given the history of this case and no evidence of his personal involvement in even one assault, let alone a murder, this is inhuman even if a court says it is lawful," he said.
An arrest warrant in Munich alleges he was a guard in Nazi-occupied Poland in 1943. Demjanjuk says he was a prisoner of war, not a camp guard.
His family says he's too old and sick to be sent to Germany, but the government says he gets around for his age and says surveillance video proves that.
The appeals court said it believed the government would provide appropriate care for Demjanjuk while deporting him.
"Based on the medical information before the court and the government's representations about the conditions under which it will transport the petitioner, which include an aircraft equipped as a medical air ambulance and attendance by medical personnel, the court cannot find that the petitioner's removal to Germany is likely to cause irreparable harm sufficient to warrant a stay of removal," the court said.
The U.S. government will continue to seek the removal of Demjanjuk to Germany, Justice Department spokeswoman Laura Sweeney said Friday. She provided no information on when that might happen.
Immigration officials provided no indication on whether it would move to deport Demjanjuk promptly.
"He remains on an order of supervision with electronic monitoring supervised by U.S. Immigration and Customs Enforcement," spokeswoman Barbara Gonzalez told The Associated Press in an e-mail.
The family made it clear that it would fight the latest deportation threat.
A lawsuit was filed in Berlin "to stop the acceptance of my father as a deportee, Demjanjuk Jr. said Friday. The issue is whether Germany can accept him without having filed a formal request for extradition.
In the filing, provided to the AP, attorney Ulrich Busch argued that the government's approval of Demjanjuk's deportation is an "evasion of justice" because Germany has not filed a formal request for extradition.