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Nikon, the world's eighth-largest chip equipment maker, said it
had filed patent infringement cases in the Netherlands, Germany
and Japan against ASML, which makes semiconductor lithography
machines, and Carl Zeiss, ASML's optical supplier.
"ASML and Zeiss employ Nikon's patented technology in ASML's
lithography systems, which are used globally to manufacture
semiconductors, without Nikon's permission, thereby infringing
Nikon's patents," Nikon said in a statement.
Nikon said it is seeking damages and to prevent ASML and Zeiss
from selling the technology.
ASML dominates the market for semiconductor lithography
machines, which map out electronic circuits on silicon wafers.
The Netherlands-based firm has a 90 percent market share in such
high-end machines, according to a January research report from
Fitch Ratings.
"Nikon's litigation is unfounded, unnecessary and creates
uncertainty for the semiconductor industry," said ASML President
and Chief Executive Officer Peter Wennink. ASML has repeatedly
attempted to negotiate an extension of a cross-license agreement
with Nikon, he said.
The legal action comes after mediation carried out by a retired
judge in the United States failed to reach a settlement late
last year, Nikon said.
Carl Zeiss was not immediately available to comment.
The dispute is the latest involving the three, with ASML and
Carl Zeiss paying Nikon $87 million and $58 million respectively
in 2004, according to Nikon.
(Reporting by Harro ten Wolde and Eric Auchard in FRANKFURT, Sam
Nussey in TOKYO; Editing by Maria Sheahan and Christopher
Cushing)
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